SVG
90 Coater Developer Track
What is it?
What do the numbers mean?
Wafer handling1
- Sensor, Cassette[1]
Gas & chemistry2
Control & software2
Configuration & options15
- With:[1]
- FTC Cabinet (Power Distribution)[1]
- Main Power GP Cabinet[1]
- Spare Parts:[1]
- Shuttle Bearing, SVG, Linear 200-595[1]
- Belt Timing SVG Dev Dispense Arm 6b16-37[1]
- TEBR Cable Chain,4mm Pitch 1.20 Pd[1]
- Cable Chain, 103 Pitch (Belt) 204-020[1]
- Spin Station Board[1]
- Thermalogic Temp Contrl Board / 121-180[1]
- Assy, Thermo Cutoff 99-23226-01[1]
- Motor, Random Shuttle Drive 99-45467-01[1]
- Motor Gear Harness 99-47222-01[1]
- Marathon Motor Mod 5kh32gnb811ax[1]
- Motor,Spindle,90s Air Assist 27-66286-01[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 90 Coater Developer Track are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 90 Coater Developer Track are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 90 Coater Developer Track are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 90 Coater Developer Track are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 90 Coater Developer Track are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 90 Coater Developer Track is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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