SVG
90 Coater Developer Track
What it is
What do the numbers mean?
Power & electrical3
Wafer handling3
- Sensor, Cassette[1]
Gas & chemistry6
Control & software3
Configuration & options18
- With:[1]
- FTC Cabinet (Power Distribution)[1]
- Main Power GP Cabinet[1]
- Spare Parts:[1]
- Shuttle Bearing, SVG, Linear 200-595[1]
- Belt Timing SVG Dev Dispense Arm 6b16-37[1]
- TEBR Cable Chain,4mm Pitch 1.20 Pd[1]
- Cable Chain, 103 Pitch (Belt) 204-020[1]
- Spin Station Board[1]
- Thermalogic Temp Contrl Board / 121-180[1]
- Assy, Thermo Cutoff 99-23226-01[1]
- Motor, Random Shuttle Drive 99-45467-01[1]
- Motor Gear Harness 99-47222-01[1]
- Marathon Motor Mod 5kh32gnb811ax[1]
- Motor,Spindle,90s Air Assist 27-66286-01[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationSVG Chemical Cabinet[1]
- ConfigurationChemical Waste Tank[1]
- Model90 Coater / Developer Track[1]
- Equipment typeCoater / Developer Track[2]
- ConfigurationFTC Cabinet (Power Distribution); Main Power GP Cabinet; SVG GUI Rack Controller Cabinet; SVG Chemical Cabinet; Chemical Waste Tank[1]
- Gas & chemistrySVG Chemical Cabinet; Chemical Waste Tank[2]
- Voltage24 VDC Solenoid 114-1003[1]
- Voltage24 VDC Solenoid 50 Psi 99-38539-01[2]
- Voltage24 Vdc Solenoid 2way Valve 114-102[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 90 Coater Developer Track are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 90 Coater Developer Track are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 90 Coater Developer Track are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 90 Coater Developer Track are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 90 Coater Developer Track are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 90 Coater Developer Track is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]fabsurplus.comfabsurplus.com
- [4]SVG 90 Coater Developer Track family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.
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