Comparison ledger
Applied Materials 0010-03254 E Chuck, Thermo Fisher Scientific FEI Helios 1200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | Scientific FEI Helios 1200Thermo Fisher |
|---|---|---|
| OEM | Applied Materials | Thermo Fisher |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Thermo Fisher Scientific FEI Helios 1200 |
| Specifications | ||
| Configuration | — | Dual beam[1] |
| GIS chemistries | — | IEE, EE, C, Pt, W, H20, IDEP[1] |
| Gas injection system | — | Maximum (4) Injectors, 1 - Included, Pt/W[1] |
| Operating system | — | Windows OS[1] |
| Manufacturer / Make | — | Thermo Fisher Scientific / FEI[1] |
| Model | — | Helios 1200[1] |
| Tool type | — | Dual-beam system[1] |
| Detectors | — | TLD and CDEM Detectors[1] |
| Integrated detector | — | Integrated EDS Detector[1] |
| Electron column | — | ELSTAR UHR Electron column[1] |
| Ion column | — | Sidewinder Ion column[1] |
| Nanomanipulator | — | Omni probe nanomanipulator[1] |
| Cleaning system | — | Plasma cleaner[1] |
| Vacuum system | — | Vacuum system[1] |
| Pumps | — | (3) IGPs[1] |
| Turbo / dry pump | — | Water-cooled turbo and dry PVP[1] |
| Stage | — | 5-Axis (X, Y, Z, R, Tilt), Compucentric stage, 300 mm piezo[1] |
| Equipment type | — | Focused ion beam (FIB) tool[2] |