Thermo Fisher

Scientific FEI Helios 1200

Thermo Fisher Scientific FEI Helios 1200 family

Research Quality: 40% complete

The Thermo Fisher Scientific FEI Helios 1200 is a dual-beam system. The Thermo Fisher Scientific FEI Helios 1200 includes TLD and CDEM detectors, an integrated EDS detector, an ELSTAR UHR electron column, and a Sidewinder ion column. The Thermo Fisher Scientific FEI Helios 1200 uses Windows OS.^[1]^[2]^[3]

Scientific FEI Helios 1200 — Inventory photo — Fig. 01Scientific FEI Helios 1200Inventory photo^[4]

Vacuum

Vacuum system^[1]

Gas delivery

IEE, EE, C, Pt, W, H20, IDEP^[1]

Optics

TLD and CDEM Detectors^[1]

How it works

The Helios 1200 includes an ELSTAR UHR electron column and a Sidewinder ion column. The Helios 1200 includes TLD and CDEM detectors and an integrated EDS detector. The Helios 1200 includes an Omni probe nanomanipulator and a plasma cleaner. The Helios 1200 includes a vacuum system with water-cooled turbo and dry PVP hardware and (3) IGPs. The Helios 1200 includes a 5-Axis (X, Y, Z, R, Tilt), Compucentric stage, 300 mm piezo. The Helios 1200 supports GIS chemistries IEE, EE, C, Pt, W, H20, and IDEP. The Helios 1200 has a gas injection system with a maximum of (4) injectors, with 1 included, Pt/W. The Helios 1200 uses Windows OS.^[1]^[2]

What do the numbers mean?

Vacuum & pumping5

Vacuum system^[1]; Water-cooled turbo and dry PVP^[1]
Vacuum system: Vacuum system^[1]
Pumps: (3) IGPs^[1]
Turbo / dry pump: Water-cooled turbo and dry PVP^[1]

Gas & chemistry2

GIS chemistries: IEE, EE, C, Pt, W, H20, IDEP^[1]
Gas injection system: Maximum (4) Injectors, 1 - Included, Pt/W^[1]

Optics & imaging8

TLD and CDEM Detectors^[1]; Integrated EDS Detector^[1]; ELSTAR UHR Electron column^[1]; Sidewinder Ion column^[1]
Detectors: TLD and CDEM Detectors^[1]
Integrated detector: Integrated EDS Detector^[1]
Electron column: ELSTAR UHR Electron column^[1]
Ion column: Sidewinder Ion column^[1]

Control & software1

Operating system: Windows OS^[1]

Configuration & options12

Dual beam^[1]; Omni probe nanomanipulator^[1]; Plasma cleaner^[1]; (3) IGPs^[1]; 5-Axis (X, Y, Z, R, Tilt), Compucentric stage, 300 mm piezo^[1]
Manufacturer / Make: Thermo Fisher Scientific / FEI^[1]
Model: Helios 1200^[1]
Tool type: Dual-beam system^[1]
Nanomanipulator: Omni probe nanomanipulator^[1]
Cleaning system: Plasma cleaner^[1]
Stage: 5-Axis (X, Y, Z, R, Tilt), Compucentric stage, 300 mm piezo^[1]
Equipment type: Focused ion beam (FIB) tool^[5]

Interested in this tool?

Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationVacuum system^[1]
ConfigurationWater-cooled turbo and dry PVP^[1]
GIS chemistriesIEE, EE, C, Pt, W, H20, IDEP^[1]
Gas injection systemMaximum (4) Injectors, 1 - Included, Pt/W^[1]
Vacuum systemVacuum system^[1]
Pumps(3) IGPs^[1]
Turbo / dry pumpWater-cooled turbo and dry PVP^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

Which beam columns are included on the Helios 1200?

The Helios 1200 includes an ELSTAR UHR electron column and a Sidewinder ion column.^[1]^[2]

Not publicly documented

The following facts about the Scientific FEI Helios 1200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Helios 1200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Helios 1200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scientific FEI Helios 1200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scientific FEI Helios 1200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scientific FEI Helios 1200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]inventory listing
[2]Scientific FEI Helios 1200 — Thermo Fisher | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]Thermo Fisher Scientific FEI Helios 1200 family | Waferpedia — waferpedia.comwaferpedia.com
[4]Inventory photo
[5]waferpedia.comwaferpedia.com