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0010-03254 E ChuckversusATS 320 V LN 2 Thermal Shock

Applied Materials 0010-03254 E Chuck, Thermotron ATS 320 V LN 2 Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
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Family—Thermotron ATS 320 V LN 2 Thermal Shock
Specifications
Configuration—460 Volt[1]
Phase—3 Phase[2]
Power—460 Volt[2]
Current—35 Amp[2]
Control / programmer—Thermotron 8800 computer programmer[2]
Electrical requirements at full load—460 / 3 / 60: 80 A[3]
Transfer basket dimensions (W x D x H)—25 x 15 x 15 inches[3]
Maximum load with LN2—80 lbs[3]
Move-in dimensions (W x D x H)—74 x 57 x 85 inches[3]
Console dimensions (W x D x H)—66 x 58 x 193 inches[3]
Temperature range with LN2—-75 to +200 °C[4]
Interior dimensions—25 in W x 15 in D x 15 in H[4]
Exterior dimensions—74 in W x 57 in D x 85 in H[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]thermotron.comthermotron.com
  4. [4]lre.comlre.com