Thermotron

ATS 320 V LN 2 Thermal Shock

Thermotron ATS 320 V LN 2 Thermal Shock family

Research Quality: 20% complete

ATS 320 V LN 2 Thermal Shock — Inventory photo — Fig. 01ATS 320 V LN 2 Thermal ShockInventory photo^[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

Service recommended

What do the numbers mean?

Power & electrical8

460 Volt^[1]
Phase: 3 Phase^[2]; 35 Amp^[1]
Power: 460 Volt^[2]
Current: 35 Amp^[2]
Electrical requirements at full load: 460 / 3 / 60: 80 A^[3]
Electrical requirements at full load: 230 / 3 / 60: 40 A^[3]
Power: 460 V, 3 Ph, 35 A^[4]

Wafer handling1

Transfer basket dimensions (W x D x H): 25 x 15 x 15 inches^[3]

Control & software2

Thermotron 8800 computer programmer^[1]
Control / programmer: Thermotron 8800 computer programmer^[2]

Dimensions & facilities5

Maximum load with LN2: 80 lbs^[3]
Move-in dimensions (W x D x H): 74 x 57 x 85 inches^[3]
Console dimensions (W x D x H): 66 x 58 x 193 inches^[3]
Interior dimensions: 25 in W x 15 in D x 15 in H^[4]
Exterior dimensions: 74 in W x 57 in D x 85 in H^[4]

Configuration & options2

Service recommended^[2]
Temperature range with LN2: -75 to +200 °C^[4]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration460 Volt^[1]
Phase3 Phase^[2]
Configuration35 Amp^[1]
Power460 Volt^[2]
Current35 Amp^[2]
Electrical requirements at full load460 / 3 / 60: 80 A^[3]
Electrical requirements at full load230 / 3 / 60: 40 A^[3]
Power460 V, 3 Ph, 35 A^[4]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the ATS 320 V LN 2 Thermal Shock are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATS 320 V LN 2 Thermal Shock are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATS 320 V LN 2 Thermal Shock are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATS 320 V LN 2 Thermal Shock are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the ATS 320 V LN 2 Thermal Shock is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the ATS 320 V LN 2 Thermal Shock are on record.
Answerable by: an OEM parts catalog or a service engineer