Waferpedia

Comparison ledger

0010-03254 E ChuckversusNT 9100 Surface Profiler

Applied Materials 0010-03254 E Chuck, Veeco NT 9100 Surface Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsVeeco
Category——
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Family—Veeco NT 9100 Surface Profiler
Specifications
Measurement capability—Non-contact, three-dimensional, topography and film thickness[1]
Light source—Long-lifetime green and white LEDs[1]
Optical assembly—Dual LED illuminator; three-position FOV turret, closed-loop, 10mm scan[1]
Stages—Automated 100mm Z-axis; ±6° tip/tilt stage; 100mm XY manual stage, standard; 150mm XY auto stage, optional[1]
Vertical measurement range—0.1nm to 10mm std. range[1]
Vertical resolution—<0.1nm RMS[1]
Repeatability—0.05nm vertical repeatability[1]
Profiler footprint—320mm W x 510mm D x 645mm H; 70kg excluding peripheral electronics and air table[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]me.iitb.ac.inme.iitb.ac.in