Veeco
NT 9100 Surface Profiler
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Veeco NT 9100 Surface Profiler is a non-contact optical profiling system. The Veeco NT 9100 Surface Profiler measures non-contact, three-dimensional topography and film thickness. The Veeco NT 9100 Surface Profiler uses a dual-LED illumination source.[1][2]
What it is
The Veeco / Wyko NT 9100 is a surface profiler. The Veeco / Wyko NT 9100 is an optical profiling system for non-contact surface metrology. The Veeco / Wyko NT 9100 is intended to map surface contours without contact to the sample. The Veeco / Wyko NT 9100 measures surface topography and film thickness in three dimensions.[3][1][4][2][5][6]
How it works
The Veeco / Wyko NT 9100 uses a dual-LED illumination source for non-contact measurements on samples ranging from super-smooth to very rough. The Veeco / Wyko NT 9100 uses long-lifetime green and white LEDs. The Veeco / Wyko NT 9100 has a dual LED illuminator, a three-position field-of-view turret, and a closed-loop scan mechanism with a 10 mm scan. The Veeco / Wyko NT 9100 supports objectives from 1.5X through 50X, with magnifications from 0.75X to 100X. The Veeco / Wyko NT 9100 has a 640 x 480 non-interlaced measurement array, with an optional 1392 x 1040 camera. The Veeco / Wyko NT 9100 has an automated 100 mm Z-axis, a ±6° tip/tilt stage, a standard 100 mm XY manual stage, and an optional 150 mm XY auto stage.[1][2]
The Veeco / Wyko NT 9100 operates with VSI and PSI measurement types. The Veeco / Wyko NT 9100 uses VSI for rough surfaces or for step height differences greater than 135 nm. The Veeco / Wyko NT 9100 uses PSI for extremely smooth surfaces such as mirrors and optics, for roughness less than 30 nm, and for height differences much less than 135 nm. The Veeco / Wyko NT 9100 is operated by bringing the sample into focus, observing fringes, adjusting tip and tilt to reduce fringe count, and then running a scan. The Veeco / Wyko NT 9100 presents results as a contour map and also supports 2D analysis plots, a 3D interactive display, and a 3D plot in Vision software.[4]
Where it fits in the process flow
The Veeco / Wyko NT 9100 was designed for R&D, wear, failure analysis, process control, and monitoring. The Veeco / Wyko NT 9100 includes production-oriented functions such as automated measurement sequences, data logging, pass-fail criteria, and built-in databasing for process feedback and SPC.[1][2]
What do the numbers mean?
Optics & imaging2
Performance1
Dimensions & facilities2
- Profiler footprint
- 320mm W x 510mm D x 645mm H; 70kg excluding peripheral electronics and air table[1]
Configuration & options3
- Stages
- Automated 100mm Z-axis; ±6° tip/tilt stage; 100mm XY manual stage, standard; 150mm XY auto stage, optional[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of measurements does the Veeco / Wyko NT 9100 perform?
The Veeco / Wyko NT 9100 performs non-contact, three-dimensional measurements of topography and film thickness.[1][2]
Not publicly documented
The following facts about the NT 9100 Surface Profiler are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NT 9100 Surface Profiler are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NT 9100 Surface Profiler are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NT 9100 Surface Profiler are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NT 9100 Surface Profiler are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NT 9100 Surface Profiler is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]me.iitb.ac.in — me.iitb.ac.inme.iitb.ac.in
- [2]http://aggiefab.tamu.edu/wp-content/uploads/2020/04/Wyko_NT9100.pdf — aggiefab.tamu.eduaggiefab.tamu.edu
- [3]Inventory photo
- [4]https://aggiefab.tamu.edu/wp-content/uploads/2020/12/Operation-Spec-WYCO-NT9100.pdf — aggiefab.tamu.eduaggiefab.tamu.edu
- [5]NT 9100 Surface Profiler — Veeco | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [6]Veeco NT 9100 Surface Profiler family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 17, 2026.
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