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0010-13622 RF Match forversusUH 108 Wafer Film Applicator

Applied Materials 0010-13622 RF Match for, Ultron UH 108 Wafer Film Applicator, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-13622 RF Match forApplied Materials
OEMApplied MaterialsUltron
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13622 RF Match forUltron UH 108 Wafer Film Applicator
Cited variants—
Specifications
ConfigurationHigh Efficiency HE RF Match-Bias[2]1 amps[3]
Model0010-13622[2]—
Product TypeRF Match for PVD (Physical Vapor Deposition)[2]—
FeatureHigh Efficiency HE RF Match-Bias[2]—
Voltage—115 Vac[3]
Phase—1 Phase[3]
Electrical requirements—1 amp, 115 Vac, single-phase, 50/60 Hz[4]
Wafer capability options—5" wafer capability; 6" wafer capability; 8" and 12" wafer capability[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]ultronsystems.comultronsystems.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com