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0010-13627 High Efficiency RF MatchversusATM 305 307 Atmospheric Wafer Handling Robot

Applied Materials 0010-13627 High Efficiency RF Match, Brooks ATM 305 307 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBrooks
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchBrooks ATM
Specifications
ConfigurationHE, BIAS[1]Single Arm[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]ATM 305/307[4]
Wafer sizes (primary)—200/300 mm[4]
Wafer sizes (alternative)—6 and 12 inch[3]
Manufacturer—Brooks / PRI[4]
Description—single arm atmospheric wafer handling robot[4]
Version—200/300 mm[4]
Arm configuration—single arm[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]fabsurplus.comfabsurplus.com