Brooks
ATM 305 307 Atmospheric Wafer Handling Robot
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Brooks ATM 305/307 Atmospheric Wafer Handling Robot is a single-arm atmospheric wafer handling robot. The Brooks ATM 305/307 handles wafers in sizes 200/300 mm.[1][2]
What it is
How it works
General reference — not yet source-verifiedAn atmospheric wafer handling robot uses a mechanical arm to pick up, carry, and place wafers. The robot operates outside vacuum chambers and serves as an automated transport device within a clean manufacturing environment.
Where it fits in the process flow
General reference — not yet source-verifiedAn atmospheric wafer handling robot sits in the material-handling path between semiconductor tools and load points. The robot supports wafer movement where atmospheric transfer is appropriate rather than vacuum transfer.
What do the numbers mean?
Wafer handling3
Configuration & options5
- Single Arm[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Is this class of machine part of the process step itself?General reference — not yet source-verified
No. Machines of this class are support systems that move wafers into, between, or out of process equipment rather than performing the core material transformation.
Not publicly documented
The following facts about the ATM 305 307 Atmospheric Wafer Handling Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the ATM 305 307 Atmospheric Wafer Handling Robot are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the ATM 305 307 Atmospheric Wafer Handling Robot are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the ATM 305 307 Atmospheric Wafer Handling Robot are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the ATM 305 307 Atmospheric Wafer Handling Robot are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the ATM 305 307 Atmospheric Wafer Handling Robot is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 13, 2026.
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