Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Edwards IH 600 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | IH 600 VacuumEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Edwards IH 600 Vacuum |
| Cited variants | — |
|
| Specifications | ||
| Configuration | HE, BIAS[2] | — |
| Asset Number | 70430[3] | — |
| Type | High Efficiency RF Match - HE, BIAS[3] | Vacuum pump[4] |
| OEM | Applied Materials[3] | — |
| Model | 0010-13627[3] | — |
| System family | — | iH dry pumping systems[1] |
| Pump configuration | — | HCDP80 dry pump with HCMB600 mechanical booster pump[1] |
| Peak speed | — | 600 cfm[5] |
| Ultimate vacuum | — | 3.2 x 10^-4 mbar; 2 x 10^-4 torr; 1.5 x 10^5 Pa; 5.3 x 10^4 Pa[5] |
| Inlet connection | — | ISO100[5] |
| Outlet connection | — | NW40[5] |
| Typical shaft seal nitrogen flow | — | 4 slm[5] |
| Weight | — | 415 kg / 913 lb[5] |
| Power input | — | 3.1 kW at 50 Hz; 3.4 kW at 60 Hz[5] |
| Rated motor power | — | 5.1 kW at 50 Hz; 6.1 kW at 60 Hz[5] |
| Oil capacity | — | 1.65 liter[5] |
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