Edwards
IH 600 Vacuum
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Edwards IH 600 Vacuum is a vacuum pump. The Edwards IH 600 Vacuum uses an HCDP80 dry pump with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. The Edwards IH 600 Vacuum has enclosed, water-cooled motors.[1]
What it is
How it works
The iH600 is an iH dry pumping system. The iH600 system includes an HCDP80 dry pump and an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. The HCMB pump is present on the iH600 and iH1000 only. The iH system operates between atmospheric pressure and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. The iH system has a gas system that introduces purge gas into the HCDP pump. The iH system can be controlled through the Pump Display Terminal. The iH system can also be controlled through an Interface Module, an iM Communications Module accessory, or an iH Single Equipment Monitor accessory.[1][5]
Applications
The iH series is intended for difficult processes such as PECVD and LPCVD where particulate, condensable, and corrosive by-products are present. The iH system is suitable for harsh duty processes. The iH system can also be used on light or medium duty processes with economiser gas mode to reduce purge nitrogen consumption. The iH system is suitable for clean environments where fan cooling of motors is unacceptable.[5]
What do the numbers mean?
Power & electrical2
Vacuum & pumping4
Dimensions & facilities1
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iH600F | — | — | Listed as an iH-F variant. | idealvac.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- TypeVacuum pump[3]
- System familyiH dry pumping systems[1]
- Pump configurationHCDP80 dry pump with HCMB600 mechanical booster pump[1]
- Ultimate vacuum3.2 x 10^-4 mbar; 2 x 10^-4 torr; 1.5 x 10^5 Pa; 5.3 x 10^4 Pa[4]
- Power input3.1 kW at 50 Hz; 3.4 kW at 60 Hz[4]
- Rated motor power5.1 kW at 50 Hz; 6.1 kW at 60 Hz[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the IH 600 Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IH 600 Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IH 600 Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IH 600 Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IH 600 Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IH 600 Vacuum are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]idealvac.com — idealvac.comidealvac.com
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]docs.chemtechsci.com — docs.chemtechsci.comdocs.chemtechsci.com
- [5]Fully Refurbished Edwards iH 600 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A53382946, A53382946, IH-600, A533-82-946 — ajvs.comajvs.com
- [6]https://www.idealvac.com/files/manuals/Edwards_IHDryPumpIH600_3a.pdf — idealvac.comidealvac.com
Last updated Oct 17, 2026.
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