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0010-13627 High Efficiency RF MatchversusRV 12 Vacuum

Applied Materials 0010-13627 High Efficiency RF Match, Edwards RV 12 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchEdwards RV 12 Vacuum
Specifications
ConfigurationHE, BIAS[1]100-230V, 50/60Hz[3]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]Dual-stage rotary vane vacuum pump[4]
OEMApplied Materials[2]—
Model0010-13627[2]RV 12[3]
Manufacturer—Edwards[3]
Equipment type—Vacuum Pump[3]
Input power—100-230V, 50/60Hz[3]
Dimensions—9in x 25in x 13in H[3]
Mass—29kg[3]
Ultimate pressure—2 x 10^-3 mbar[4]
Peak pumping speed—12 m3/h[4]
Inlet flange—NW25[4]
Exhaust flange—NW25[4]
Motor power—450 / 550 W[4]
Power connector—1-ph IEC EN60320 C13[4]
Nominal rotation speed—1500 / 1800 rpm[4]
Weight without oil—29 kg[4]
Oil capacity—0.65 / 1 litres[4]
Recommended oil—Ultragrade 19[4]
Noise level—48 dB(A) at 50 Hz[4]
Operating temperature range—12–40 °C[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]ajvs.comajvs.com