Edwards
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The Edwards RV 12 Vacuum is a dual-stage rotary vane vacuum pump. The Edwards RV 12 Vacuum has an ultimate pressure of 2 x 10^-3 mbar. The Edwards RV 12 Vacuum uses NW25 inlet and exhaust flanges.[1][2][3]

Vacuum pumps evacuate gas from chambers, lines, and instruments. Rotary vane pumps are oil-sealed mechanical pumps used to create rough and medium vacuum for laboratory tools, support equipment, and as backing pumps for higher-vacuum stages.
A rotary vane vacuum pump traps and compresses gas by sweeping sealed volumes through a stator with a rotor and sliding vanes. An oil-sealed rotary vane pump uses oil for sealing, lubrication, and heat removal. A gas ballast admits a controlled amount of gas to reduce condensation inside the pump when vapors are being pumped.
Vacuum pumps of this class sit below process chambers and vacuum instruments as utility hardware. Such pumps are commonly used to evacuate small chambers, forelines, transfer hardware, and analytical instruments, and they also serve as backing pumps for high-vacuum pump stages.
Rotary vane vacuum pumps are used anywhere a compact mechanical vacuum source is needed for chamber pumpdown, sample handling, degassing, drying, and instrument support. Such pumps are common in laboratories, pilot lines, and support systems that need a stable forevacuum source.
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The Edwards RV 12 is a vacuum pump.[4]
The following facts about the RV 12 Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RV 12 Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RV 12 Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RV 12 Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RV 12 Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RV 12 Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 20, 2026.
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