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0010-13627 High Efficiency RF MatchversusR 208 FMC 2

Applied Materials 0010-13627 High Efficiency RF Match, Semitool R 208 FMC 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
R 208 FMC 2Semitool
OEMApplied MaterialsSemitool
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size—Single wafer
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchSemitool R 208 FMC 2
Specifications
ConfigurationHE, BIAS[1]DHF, NH4OH, H2O2, H2SO4, IPA[4]
Asset Number70430[2]—
TypeHigh Efficiency RF Match - HE, BIAS[2]—
OEMApplied Materials[2]—
Model0010-13627[2]R 208 FMC 2[3]
Wafer size—Single wafer[3]
OS—Windows NT[4]
Manufacturer—Semitool[3]
Category—Lab & Support Equipment[3]
Control system—Windows NT[4]
Bowls / cabinet—4 bowls, 2ea LD - Chemical cabinet[4]
Gas delivery / support—Ozone Gen., Pump, Chiller[3]
Status note—Bowl is off-line[4]
Process chemistry—DHF, NH4OH, H2O2, H2SO4, IPA[4]
Vintage—2005[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing