Waferpedia

Semitool

R 208 FMC 2

Single waferSemitool R 208 FMC 2 family
Research Quality: 20% complete
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Single wafer

Vacuum

Pump[1]

Gas delivery

4 bowls, 2ea LD - Chemical cabinet[1]

What is it?

Semitool R 208 FMC 2 is a single-wafer system configured for DHF, NH4OH, H2O2, H2SO4, and IPA.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Bowl is off-line

What do the numbers mean?

Vacuum & pumping1

Pump[1]
Accurate?

Wafer handling1

Wafer size
Single wafer[1]
Accurate?

Gas & chemistry1

4 bowls, 2ea LD - Chemical cabinet[1]
Accurate?

Configuration & options5

DHF, NH4OH, H2O2, H2SO4, IPA[1]
Accurate?
OS
Windows NT[1]
Accurate?
Ozone Gen.[1]
Accurate?
Chiller[1]
Accurate?
Bowl is off-line[1]
Accurate?
Interested in this tool?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration4 bowls, 2ea LD - Chemical cabinet[1]
  • ConfigurationPump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the R 208 FMC 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R 208 FMC 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the R 208 FMC 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the R 208 FMC 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the R 208 FMC 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the R 208 FMC 2 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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