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Semitool

R 208 FMC 2

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The Semitool R 208 FMC 2 is a lab and support equipment system. The Semitool R 208 FMC 2 is configured as a single-wafer system. The Semitool R 208 FMC 2 uses Windows NT.[1][2]

Semitool logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Single wafer

Vacuum

Pump[2]

Gas delivery

4 bowls, 2ea LD - Chemical cabinet[2]

What it is

The Semitool R 208 FMC 2 is a lab and support equipment system in a single-wafer configuration.[1][3]

How it works

The R 208 FMC 2 is a wet-process system that uses DHF, NH4OH, H2O2, H2SO4, and IPA in its configured process set.[2][1][3]

Where it fits in the process flow

The Semitool R 208 FMC 2 is part of a process setup that includes a chemical cabinet, a pump, an ozone generator, and a chiller.[2][1]

Applications

The Semitool R 208 FMC 2 is used for single-wafer wet chemical processing with DHF, NH4OH, H2O2, H2SO4, and IPA.[2][1][3]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Bowl is off-line

What do the numbers mean?

Vacuum & pumping2

Pump[2]
Accurate?
Gas delivery / support
Ozone Gen., Pump, Chiller[1]
Accurate?

Wafer handling1

Wafer size
Single wafer[1]
Accurate?

Gas & chemistry3

4 bowls, 2ea LD - Chemical cabinet[2]
Accurate?
Bowls / cabinet
4 bowls, 2ea LD - Chemical cabinet[2]
Accurate?
Process chemistry
DHF, NH4OH, H2O2, H2SO4, IPA[2]
Accurate?

Control & software1

Control system
Windows NT[2]
Accurate?

Configuration & options10

DHF, NH4OH, H2O2, H2SO4, IPA[2]
Accurate?
OS
Windows NT[2]
Accurate?
Ozone Gen.[2]
Accurate?
Chiller[2]
Accurate?
Bowl is off-line[2]
Accurate?
Manufacturer
Semitool[1]
Accurate?
Model
R 208 FMC 2[1]
Accurate?
Category
Lab & Support Equipment[1]
Accurate?
Status note
Bowl is off-line[2]
Accurate?
Vintage
2005[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration4 bowls, 2ea LD - Chemical cabinet[2]
  • ConfigurationPump[2]
  • Bowls / cabinet4 bowls, 2ea LD - Chemical cabinet[2]
  • Gas delivery / supportOzone Gen., Pump, Chiller[1]
  • Process chemistryDHF, NH4OH, H2O2, H2SO4, IPA[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What types of chemistries can this class of machine handle?General reference — not yet source-verified

Wet chemical processing stations of this class are typically designed with corrosion-resistant fluid paths so that they can handle a range of acids, bases, solvents, and aqueous solutions. The exact compatibility depends on the installed wetted materials and system configuration.

Is this type of machine automated or manual?General reference — not yet source-verified

Machines in this class are often semi-automated, with manual loading and unloading but automated control of chemical delivery, process time, rinsing, and drying. The degree of automation can vary from basic timer-based operation to recipe-driven process control.

What should an engineer check before using such a system?General reference — not yet source-verified

An engineer should check the compatibility of the workpiece carrier and process chamber with the intended chemistry, confirm that the rinse and exhaust systems are functioning, and ensure that the process recipe matches the desired etch rate, cleaning effect, or strip performance.

Not publicly documented

The following facts about the R 208 FMC 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the R 208 FMC 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the R 208 FMC 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the R 208 FMC 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the R 208 FMC 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the R 208 FMC 2 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]Semitool R 208 FMC 2 family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 13, 2026.

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