Comparison ledger
Applied Materials 0010-14300 Magnet Assy, Applied Materials VIISta 80 High Current, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-14300 Magnet AssyApplied Materials | VIISta 80 High CurrentApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | Laser Wafer Mapping |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-14300 Magnet Assy | Applied Materials VIISTA |
| Specifications | ||
| Configuration | P4 Magnet Assy, IMP[1] | Chamber A - DPN (Aluminum)[2] |
| Gearbox P/N | 0010-27417[1] | — |
| Part Number | 0010-14300[1] | — |
| Description | P4 Magnet Assy, IMP[1] | — |
| Line Voltage | — | 3 Phase, 208 V[2] |
| Line Frequency | — | 50 / 60 Hz[2] |
| UPS | — | EATON 9 PX 3000[2] |
| He MFC Size | — | Optional[2] |
| N 2 MFC Size | — | 1 slm (for 500 sccm in the recipe)[2] |
| Type | — | UES with Turbo Foreline[2] |
| Cassette Stage | — | 200 mm (8") Standard[2] |
| Wafer size | — | Laser Wafer Mapping[2] |
| Lamp Colors | — | Red, Orange, Green[2] |
| Chiller | — | Affinity RAA 012 K CE 55 CBC[2] |
| DI Cart | — | VIISta 80 with B-Pure Filters[2] |
| Manufacturer | — | Applied Materials / Varian[3] |
| Model | — | VIISta 80[3] |
| Wafer Size | — | 200 mm (8 inch)[2] |
| Gas Box | — | 5 sticks, HP and SDS 2 in use; He MFC optional; N2 MFC 1 slm[2] |
| Loadlock / Cassette | — | 2 chambers, UES with Turbo Foreline; Cassette Stage 200 mm (8") Standard with Laser Wafer Mapping[2] |
| Vintage | — | 2000[2] |
| Laser Wafer Mapping | — | Yes[2] |
| Loadlock Chambers | — | 2, Type UES with Turbo Foreline[2] |
| Year of Manufacture | — | 2000[2] |
| SMIF Version | — | 200 mm SMIF[4] |
| Manufacturing Date | — | 2000-12-01[4] |
Plan your fab
Building a Ion Implantation process? Get a complete equipment list.
Open the fab equipment planner →