Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 e 5 Kiyo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 2300 e 5 KiyoLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 2300 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 3 Chamber + 1 Strip[3] |
| Loadport | — | TDK TAS300[3] |
| ATM Robot | — | Kawasaki P/N 3NT510B-A002[3] |
| TM Robot | — | Brooks 201600-294-0002[3] |
| MKS E28D-29237 Process Vacuum Gauge | — | 0.1 Torr[3] |
| MKS 625D-30518 Chamber Vacuum Gauge | — | 1 Torr[3] |
| Number of Chambers | — | 3 Chamber + 1 Strip[3] |
| Turbo Pump | — | Edwards STP-XA3203CV[3] |
| Turbo Pump Controller | — | Edwards SCU-1600[3] |
| Bias RF Generator | — | Lam 3156110-214[3] |
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