Lam Research
2300 e 5 Kiyo
What is it?
What do the numbers mean?
Power & electrical2
Vacuum & pumping6
Wafer handling2
Gas & chemistry1
- Horiba Gas Box[1]
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationLam ESC Power Supply[1]
- ConfigurationHoriba Gas Box[1]
- MKS E28D-29237 Process Vacuum Gauge0.1 Torr[1]
- MKS 625D-30518 Chamber Vacuum Gauge1 Torr[1]
- ConfigurationMKS 625D-30518 Fore Line Vacuum Gauge (10 Torr)[1]
- ConfigurationMKS TM Vacuum Gauge[1]
- ConfigurationEdwards STP-XA3203CV Turbo Pump[1]
- ConfigurationEdwards SCU-1600 Turbo Pump Controller[1]
- ConfigurationLam 3156110-214 Bias RF Generator[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 2300 e 5 Kiyo are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 e 5 Kiyo are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2300 e 5 Kiyo are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2300 e 5 Kiyo are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2300 e 5 Kiyo are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2300 e 5 Kiyo is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.