Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 Flex 45, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 2300 Flex 45Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 2300 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | 2300 Flex 45[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Metal HP MWS[3] |
| 3 Chambers | — | Insulating Film / Metal / Ashing[3] |
| Make | — | Lam[3] |
| Equipment type | — | Etcher[3] |
| Chambers | — | 3 chambers[3] |
| Process coverage | — | Insulating film / Metal / Ashing[3] |
| Gases used for insulating film | — | C4F8, CF4, CH3F[3] |
| Gases used for metal | — | Cl2, BCl3[3] |
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