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Lam Research

2300 Flex 45

EtchLam Research 2300 family
Research Quality: 30% complete
2300 Flex 45 — Inventory photo
Fig. 012300 Flex 45Inventory photo[1]

What is it?

Lam 2300 Flex 45 is an etcher identified with metal high-productivity wet strip (HP MWS) use and a three-chamber configuration.

What do the numbers mean?

Gas & chemistry1

Gases Used:[1]
Accurate?

Configuration & options10

Metal HP MWS[1]
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3 Chambers
Insulating Film / Metal / Ashing[1]
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Insulating Film (C4F8, CF4, CH3F)[1]
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Metal (Cl2, BCl3)[1]
Accurate?
Loadport (3)[2]
Accurate?
EFEM[2]
Accurate?
VTM[2]
Accurate?
PM (3)[2]
Accurate?
RPDB[2]
Accurate?
AC Rack[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationGases Used:[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 2300 Flex 45 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2300 Flex 45 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2300 Flex 45 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2300 Flex 45 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 2300 Flex 45 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 2300 Flex 45 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
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Last updated Jul 29, 2026.

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