Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research TCP 9600 SE Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | TCP 9600 SE MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research TCP 9600 |
| Specifications | ||
| OEM | Applied Materials[1] | Lam Research[3] |
| Model | 0010-16392[1] | TCP 9600 SE[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Install Type | — | Through-the-wall[3] |
| Software Type | — | Lam Envision[3] |
| Software Version | — | E 1.5.2[3] |
| Configuration | — | SECS Interface[3] |
| Electrical Requirements | — | 208V/80A[3] |
| PM 1 / Main Chamber | — | Metal Etch[3] |
| Helium Cooling MFC Type | — | UNIT UPC8130[3] |
| Main On-Board AC Distribution Type | — | Fused[3] |
| DSQ Type | — | Hinged[3] |
| Endpoint Type | — | Monochromators[3] |
| Voltage | — | 208 V[4] |
| Wafer Sizes | — | 6 inch, 8 inch[5] |
| SECS Interface | — | Yes[3] |
| Mainframe Type | — | Stand Alone Etcher Mainframe[3] |
| Process Module | — | PM 1 / Main Chamber: Metal Etch[3] |
| Gas Box | — | Orbitally Welded Gas Box[3] |
| Backside Helium Cooling | — | Yes[3] |
| Heated Pumping Manifolds | — | Yes[3] |
| On-Board RF Generators | — | Yes[3] |
| WVDS | — | Yes[3] |
| Indexers | — | Hine 38A Indexers[3] |
| Endpoint Detection System | — | Yes[3] |
| Endpoint Lam PN | — | 830-330546-001[3] |
| Chamber Liner | — | Yes[3] |
| Chamber Anodization Condition | — | Good[3] |
| Electrode Fixed Gap | — | Yes[3] |
| Wafer Clamp Type | — | ESC (Electrostatic Chuck)[3] |
| ESC Type | — | Polyamid[3] |
| Gate Valve Type | — | Pendulum[3] |
| TCP Coil Size | — | 6"[3] |
| Chiller Make/Model | — | Edwards TCU40/80[3] |
| Chiller Electrical Requirements | — | 200/208VAC / 25A[3] |
| Chiller Number of Cooling Channels | — | One[3] |
| Wafer Clamp | — | ESC[3] |
| Gate Valve | — | Pendulum[3] |
| # of Cooling Channels | — | One[3] |
| Gas Panel | — | Standard[3] |
| Chamber Process | — | Metal Etch (PM 1 / Main Chamber)[3] |
| RF Generators | — | On-Board[3] |
| Main AC Distribution Type | — | Fused[3] |
| Electrode Type | — | Fixed Gap[3] |
| Chiller Model | — | Edwards TCU40/80[3] |
| Number of Cooling Channels | — | One[3] |
| Additional Electrical (208 V variant) | — | 208 V[4] |
| Category | — | Etch[3] |
| Main chamber | — | Metal Etch[3] |
| Chiller | — | Edwards TCU40/80[3] |
| Gas panel | — | Standard Gas Panel[3] |
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