Lam Research

TCP 9600 SE Metal

Etch Lam Research TCP 9600 family

Research Quality: 20% complete

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TCP 9600 SE Metal — Inventory photo — Fig. 01TCP 9600 SE MetalInventory photo^[1]

Power

208V/80A^[1]

Vacuum

Heated Pumping Manifolds^[1]

Gas delivery

Standard Gas Panel^[1]

What is it?

What do the numbers mean?

Power & electrical2

Electrical Requirements: 208V/80A^[1]; On-Board RF Generators^[1]

Vacuum & pumping1

Heated Pumping Manifolds^[1]

Accurate?

Wafer handling1

Hine 38A Indexers^[1]

Accurate?

Gas & chemistry3

Standard Gas Panel^[1]; Orbitally Welded Gas Box^[1]
Helium Cooling MFC Type: UNIT UPC8130^[1]

Control & software3

Software Type: Lam Envision^[1]
Software Version: E 1.5.2^[1]; SECS Interface^[1]

Configuration & options10

Install Type: Through-the-wall^[1]; Stand Alone Etcher Mainframe^[1]
PM 1 / Main Chamber: Metal Etch^[1]; Key Stand Alone Mainframe Items^[1]; Backside Helium Cooling^[1]
Main On-Board AC Distribution Type: Fused^[1]; WVDS^[1]
DSQ Type: Hinged^[1]; Endpoint Detection System^[1]
Endpoint Type: Monochromators^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Electrical Requirements208V/80A^[1]
ConfigurationStandard Gas Panel^[1]
ConfigurationOrbitally Welded Gas Box^[1]
Helium Cooling MFC TypeUNIT UPC8130^[1]
ConfigurationHeated Pumping Manifolds^[1]
ConfigurationOn-Board RF Generators^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the TCP 9600 SE Metal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TCP 9600 SE Metal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the TCP 9600 SE Metal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the TCP 9600 SE Metal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TCP 9600 SE Metal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TCP 9600 SE Metal is not on record.
Answerable by: an OEM datasheet or a fab qualification report