Comparison ledger
Applied Materials 0010-16392 ESC Assembly, STS M Plex Multiplex ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | STS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | STS M Plex Multiplex ICP |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 3 inch[3] |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 400 V[3] |
| Frequency | — | 50 Hz[3] |
| Phase | — | 3 Phase[3] |
| Configuration | — | MAG 900 CT Turbo pump[3] |
| Roughing Pump Code | — | A532-80-905[3] |
| Turbo Pump | — | MAG 900 CT Turbo pump[3] |
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