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STS

M Plex Multiplex ICP

EtchSTS M Plex Multiplex ICP family
Research Quality: 20% complete
STSM Plex Multiplex ICP
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Power

400 V[1]

Vacuum

MAG 900 CT Turbo pump[1]

What is it?

The STS M Plex Multiplex ICP Etcher is an inductively coupled plasma etcher specified for 3-inch wafers.

What do the numbers mean?

Power & electrical5

Voltage
400 V[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
Phase
3 Phase[1]
Accurate?
ENI ACG-10B RF generator[1]
Accurate?
ENI ACG-3B-06 RF generator[1]
Accurate?

Vacuum & pumping3

MAG 900 CT Turbo pump[1]
Accurate?
Leybold Mag Drive 1000 pump controller[1]
Accurate?
BOC Edwards iQDP-80 roughing pump[1]
Accurate?

Control & software2

Phase
ENI VL-400 phase shift controller[1]
Accurate?
LEP300 control server[1]
Accurate?

Configuration & options2

PowerBright VC-2000 step-up/down transformer[1]
Accurate?
Neslab RTE-211 recirculating chiller[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage400 V[1]
  • Frequency50 Hz[1]
  • Phase3 Phase[1]
  • ConfigurationMAG 900 CT Turbo pump[1]
  • ConfigurationLeybold Mag Drive 1000 pump controller[1]
  • ConfigurationENI ACG-10B RF generator[1]
  • ConfigurationENI ACG-3B-06 RF generator[1]
  • ConfigurationBOC Edwards iQDP-80 roughing pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the M Plex Multiplex ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M Plex Multiplex ICP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M Plex Multiplex ICP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M Plex Multiplex ICP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M Plex Multiplex ICP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M Plex Multiplex ICP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing
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Last updated Jul 29, 2026.

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