Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 4100 FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | S 4100 FE-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi S 4100 FE-SEM |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Manually operated 5 axis specimen chamber[2] |
| Secondary electron image resolution | — | 2.0nm at 30 KV[2] |
| Magnification | — | 20X - 300KX[2] |
| Electron gun | — | cold field emission source[2] |
| Lens type | — | electromagnetic[2] |
| Objective aperture | — | 4 position externally selectable[2] |
| Stigmator | — | octopole electromagnetic[2] |
| Scanning coil | — | 2-stage electromagnetic[2] |
| Airlock | — | prepumped[2] |
| Stage motion | — | 5 axis manual, X/Y: 25mm, Z: 5-30mm, T: -5° - +45°, R: 360° (continuous)[2] |
| Draw-out door | — | Max sample size: 150mm diameter[2] |
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