Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 8820 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | S 8820 CD-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi S 8820 CD-SEM |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Flat edge type[3] |
| Missing Parts | — | HV Controller, Monitor[2] |
| Robot & Pri-Aligner | — | MECS UTC 100, OF 250[3] |
| Gun Tip Type | — | Denka 174DH[3] |
| Image Resolution | — | 5 nm (800V)[3] |
| Accelerating Voltage | — | 500V to 1300V (10V step)[3] |
| Electron Optic System | — | 3 stage lens systems (retarding method)[3] |
| Measure Repeatability | — | 3 sigma 1% or 5 nano[3] |
| CD Measurement Range | — | 0.1 ~ 10 micro[3] |
| Magnification | — | OM mode : x 100, SEM mode : x 300 ~ 200,000[3] |
| Throughput | — | 25 wafer/hour, 5point[3] |
| OS version | — | HP-UNIX 9.05[3] |
| SEM Version | — | Ver 9.25[3] |
| EWS | — | HP 715-33 with 4:3 LCD type monitor[3] |
| Vacuum system | — | 3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[3] |
| Stage system | — | X-Y 200mm Full range automatic motor driving[3] |
| Wafer sizes supported | — | 6 inch and 8 inch[6] |
| Tool type | — | CD-SEM (Critical Dimension Scanning Electron Microscope)[7] |
| OEM | — | Hitachi[7] |
| Model | — | S 8820[7] |
| Type | — | CD-SEM (Critical Dimension Scanning Electron Microscope)[7] |
| Wafer size | — | 6 inch[8] |
| Category | — | Critical Dimension Scanning Electron Microscope[7] |
| Wafer sizes | — | 6 inch; 8 inch[8] |
| Vintage year | — | 1995[7] |
| Equipment type | — | Critical Dimension Scanning Electron Microscope[7] |
| Vintage | — | 1995[7] |
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