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Hitachi

S 8820 CD-SEM

Metrology & InspectionHitachi S 8820 CD-SEM family
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S 8820 CD-SEM — Inventory photo
Fig. 01S 8820 CD-SEMInventory photo[1]

Power

5 nm (800V)[8]

Vacuum

Without dry pump[8]

Performance

3 sigma 1% or 5 nano[8]

Optics

3 stage lens systems (retarding method)[8]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing parts: HV Controller, Monitor

What do the numbers mean?

Power & electrical2

Image Resolution
5 nm (800V)[8]
Accurate?
Accelerating Voltage
500V to 1300V (10V step)[8]
Accurate?

Vacuum & pumping2

Vacuum system
3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[8]
Accurate?
Without dry pump[8]
Accurate?

Wafer handling3

Cassette index 6" 2 port[8]
Accurate?
Robot & Pri-Aligner
MECS UTC 100, OF 250[8]
Accurate?
Throughput
25 wafer/hour, 5point[8]
Accurate?

Optics & imaging2

Electron Optic System
3 stage lens systems (retarding method)[8]
Accurate?
Magnification
OM mode : x 100, SEM mode : x 300 ~ 200,000[8]
Accurate?

Performance1

Measure Repeatability
3 sigma 1% or 5 nano[8]
Accurate?

Control & software6

Missing Parts
HV Controller, Monitor[1]
Accurate?
TMP 1 (+ Control)[9]
Accurate?
TMP 2 (+ Control)[9]
Accurate?
Aligner (+ Control)[9]
Accurate?
EVAC Controller[9]
Accurate?
Stage Controller[10]
Accurate?

Configuration & options9

Flat edge type[8]
Accurate?
Gun Tip Type
Denka 174DH[8]
Accurate?
CD Measurement Range
0.1 ~ 10 micro[8]
Accurate?
OS version
HP-UNIX 9.05[8]
Accurate?
SEM Version
Ver 9.25[8]
Accurate?
EWS
HP 715-33 with 4:3 LCD type monitor[8]
Accurate?
Stage system
X-Y 200mm Full range automatic motor driving[8]
Accurate?
Fully refurbished[8]
Accurate?
Missing Parts:[9]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Image Resolution5 nm (800V)[8]
  • Accelerating Voltage500V to 1300V (10V step)[8]
  • Vacuum system3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[8]
  • ConfigurationWithout dry pump[8]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the S 8820 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 8820 CD-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 8820 CD-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 8820 CD-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the S 8820 CD-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the S 8820 CD-SEM are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (14)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
  14. [14]Equipment inventory listing
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Last updated Jul 29, 2026.

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