Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusP-20H

Applied Materials 0010-18024 Pyrometer Assembly, KLA P-20H, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle—Legacy
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA P-20H
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Tool type—Stylus profilometer[2]
Stylus tip radius—2 µm[2]
Stylus cone angle—60°[2]
Vertical range—325 µm[2]
Sensor element—Capacitive sensor element[2]
Motion stage—Precision motion stage[2]
Vertical resolution—Roughly nm scale[2]
Stage movement—8 inch[2]
Serial number—09940111[2]
Tool owner—Joseph Jacob[2]
Access mode—Walk-up tool (no reservation needed)[2]
S/N—09940111[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu