P-20H

The KLA P-20H is a stylus profilometer used for quantitative surface topography measurement. The KLA P-20H uses a sharp stylus with a 2 µm tip radius. The KLA P-20H is capable of 3-D surface imaging.^[1][2]

The KLA P-20H holds the stylus at a fixed position while the sample is scanned on a precision translation stage. The KLA P-20H uses a capacitive sensor element to detect stylus motion. The KLA P-20H has a 60 stylus cone angle, a 325 µm vertical range, roughly nanometer-scale vertical resolution, and 8 inch stage movement.^[1][2]

Profilometry is typically used as an offline metrology step between patterning, deposition, etch, planarization, and related process modules. Profilometry is commonly applied after a film or etch step has created a measurable height difference, and the resulting data can be used to verify process outcome before later fabrication or analysis steps.

The KLA P-20H is used for measuring the thickness of thin films using a patterned step. The KLA P-20H is used for wafer bow measurement for film stress analysis. The KLA P-20H is used for quantitative surface roughness measurement across large areas. The KLA P-20H can acquire line scans and area scans.^[1][4][2]