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Comparison ledger

0010-18024 Pyrometer AssemblyversusNanospec AFT Metrology

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation Nanospec AFT Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Nanospec AFT MetrologyOnto Innovation
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation Nanospec AFT Metrology
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Manufacturer—Onto Innovation[2]
Model—Nanospec AFT[2]
Category—Metrology & Inspection[3]
Measurement method—Reflectometry[4]
Measurement target—Thickness of transparent thin films on silicon wafers[4]
Wafer diameters—100 mm, 150 mm[5]
Wafer materials—silicon[5]
Wafer holder—delrin[5]
Wafer thickness—200 .. 1000 µm[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]nist.govnist.gov
  5. [5]mems-exchange.orgmems-exchange.org