Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusRPM 2000 PL Mapper

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation RPM 2000 PL Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
RPM 2000 PL MapperOnto Innovation
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—2"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation RPM 2000 PL Mapper
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]785nm and almost new 532nm lasers (suitable for most As-P materials)[2]
Wafer size—2"-6" wafer size range[2]
OEM—ONTO / Nanometrics[2]
Model—RPM 2000[2]
Wafer sizes—2, 3, 4, 5, 6 inch[2]
Wafer chuck—2" and 3" wafer chuck[3]
Laser wavelength—785nm and almost new 532nm lasers[2]
Detectors—InGaAs and Si CCD detectors[2]
Light source—White light source[2]
Measurement applications—Thickness, VCSEL, DBR measurements[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing