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RPM 2000 PL Mapper

2"Onto Innovation RPM 2000 PL Mapper family
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RPM 2000 PL Mapper — Inventory photo
Fig. 01RPM 2000 PL MapperInventory photo[1]

What is it?

What do the numbers mean?

Wafer handling2

Wafer size
2"-6" wafer size range[2]
Accurate?
Wafer size
Has a 2" & 3" wafer chuck[1]
Accurate?

Optics & imaging2

785nm and almost new 532nm lasers (suitable for most As-P materials)[2]
Accurate?
InGaAs and Si CCD detectors (sensitivity from ~400-1670nm)[2]
Accurate?

Configuration & options1

White light source for thickness, VCSEL, DBR measurements[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the RPM 2000 PL Mapper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RPM 2000 PL Mapper are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the RPM 2000 PL Mapper are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the RPM 2000 PL Mapper are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the RPM 2000 PL Mapper are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the RPM 2000 PL Mapper is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
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Last updated Jul 29, 2026.

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