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0010-18024 Pyrometer AssemblyversusS 300 ULTRA II Transparent Film Metrology

Applied Materials 0010-18024 Pyrometer Assembly, Onto Innovation S 300 ULTRA II Transparent Film Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsOnto Innovation
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyOnto Innovation S 300 ULTRA II Transparent Film Metrology
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]50/60 Hz[2]
Robot Finger Type—Brooks ABM 407[3]
Load Port Type—Brooks FIXLOAD (x2) with FOUP capability[2]
Light source—laser 633 nm HeNe and solid-state 780 nm , and 905 nm[2]
UV lamp—190nm to 400nm[2]
Spot size—50 μm DUV and 2.5 μm/15 μm /50 μm (high medium and low magnification) visible /IR[2]
Wafer Size—12 inch[3]
Power—50/60 Hz[3]
Spectroscopic Reflectometry Range—190 nm to 905 nm[3]
Enhanced Modulated Scanning Monochrometer—for DUV range[2]
OMA Detector—for the visible/IR range[2]
Manufacturer—Onto Innovation[3]
Model—S 300 ULTRA II Transparent Film Metrology[2]
Category—Metrology & Inspection[3]
Electrical—100-240 Vac 1 N/PE[2]
Light Source—laser 633 nm HeNe, solid-state 780 nm, and 905 nm[2]
Spot Size—50 μm DUV and 2.5 μm / 15 μm / 50 μm visible/IR[2]
Optics—OMA detector for the visible/IR range[3]
Measurement Capability—DUV, visible/IR, and UV measurement capabilities[3]
Vintage—2005[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com