Onto Innovation
S 300 ULTRA II Transparent Film Metrology
The S 300 ULTRA II Transparent Film Metrology is a 12-inch wafer metrology system for transparent film measurement. The S 300 ULTRA II uses multiple light sources including a 633 nm HeNe laser, solid-state 780 nm and 905 nm sources, and a UV lamp covering 190 nm to 400 nm. The S 300 ULTRA II covers spectroscopic reflectometry from 190 nm to 905 nm.[1][2]
What it is
How it works
The S 300 ULTRA II Transparent Film Metrology uses a 633 nm HeNe laser, solid-state sources at 780 nm and 905 nm, a UV lamp covering 190 nm to 400 nm, spectroscopic reflectometry covering 190 nm to 905 nm, an enhanced modulated scanning monochrometer for the DUV range, and an OMA detector for the visible and IR range.[1][2]
The S 300 ULTRA II Transparent Film Metrology uses spot sizes of 50 μm in the DUV range and 2.5 μm, 15 μm, and 50 μm in the visible and IR range.[1][2]
Where it fits in the process flow
Applications
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What light sources are used in the system?
The system uses a laser source at 633 nm (HeNe), solid-state sources at 780 nm and 905 nm, and a UV lamp covering 190 nm to 400 nm.[1][2]
What spot sizes are available?
Spot sizes are 50 μm for the DUV range and 2.5 μm, 15 μm, and 50 μm for the visible/IR range (corresponding to high, medium, and low magnification).[1][2]
Not publicly documented
The following facts about the S 300 ULTRA II Transparent Film Metrology are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 300 ULTRA II Transparent Film Metrology are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 300 ULTRA II Transparent Film Metrology are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 300 ULTRA II Transparent Film Metrology are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 300 ULTRA II Transparent Film Metrology are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 300 ULTRA II Transparent Film Metrology is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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