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S 300 ULTRA II Transparent Film Metrology

S 300 ULTRA II Transparent Film Metrology — Inventory photo
Fig. 01S 300 ULTRA II Transparent Film MetrologyInventory photo[1]

Power

50/60 Hz[1]

Optics

OMA detector for the visible/IR range[1]

What is it?

The ONTO / Rudolph S 300 ULTRA II Transparent Film Metrology System is a 12-inch wafer metrology system with DUV, visible/IR, and UV measurement capabilities.

What do the numbers mean?

Power & electrical1

50/60 Hz[1]
Accurate?

Wafer handling1

Robot Finger Type
Brooks ABM 407[1]
Accurate?

Optics & imaging4

Light source
laser 633 nm HeNe and solid-state 780 nm , and 905 nm[1]
Accurate?
Spectroscopic reflectoment covering 190 nm to 905 nm[1]
Accurate?
Spot size
50 μm DUV and 2.5 μm/15 μm /50 μm (high medium and low magnification) visible /IR[1]
Accurate?
OMA detector for the visible/IR range[1]
Accurate?

Configuration & options4

100-240 Vac 1 N/PE[1]
Accurate?
Load Port Type
Brooks FIXLOAD (x2) with FOUP capability[1]
Accurate?
UV lamp
190nm to 400nm[1]
Accurate?
Enhanced modulated scanning monochrometer for DUV range[1]
Accurate?
Interested in this tool?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S 300 ULTRA II Transparent Film Metrology are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 300 ULTRA II Transparent Film Metrology are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 300 ULTRA II Transparent Film Metrology are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 300 ULTRA II Transparent Film Metrology are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 300 ULTRA II Transparent Film Metrology are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 300 ULTRA II Transparent Film Metrology is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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