Waferpedia

Comparison ledger

0010-21246 Partversus166

Applied Materials 0010-21246 Part, YES 166, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
166YES
OEMApplied MaterialsYES
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle—Legacy
Lifecycle milestones——
Control system——
Generation——
Family—YES 166
Specifications
Mentioned form—166 hr time delay in a BCB adhesion table[1]
Associated materials—Cyclotene 3022-57 and Cyclotene 4024-40[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu