Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Axcelis Integra ES Plasma Dry Strip, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | Integra ES Plasma Dry StripAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Axcelis Integra ES Plasma Dry Strip |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | Integra[4] |
| Description | HTESC PH 1 REV A[2] | ES Plasma Dry Strip System[4] |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Phase | — | 3 Phase[3] |
| Configuration | — | 50/60 Hz[3] |
| Manufacturer | — | Axcelis[4] |
| Version | — | 300 mm[5] |
| Power | — | 3 Phase[3] |
| Frequency | — | 50/60 Hz[3] |
| Current | — | 220 A[3] |
| Vintage | — | 2011[3] |