Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus4-point

Applied Materials 0010-22161 High EFF RF Match, Veeco 4-point, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
4-pointVeeco
OEMApplied MaterialsVeeco
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchVeeco 4-point
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Listed in metrology suite—Veeco 4-point probe[3]
Maximum substrate size—6 inch[4]
Measurement capabilities—Sheet resistance, slice resistivity, V/I, metallization thickness, P‑N type testing[5]
Probe mechanism—Wafer is moved into the probe head, not vice versa[5]
Measurement Capabilities—Sheet resistivity, slice resistivity, metallization thickness, P-N type testing[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]cores.research.asu.educores.research.asu.edu
  4. [4]nnci.netnnci.net
  5. [5]nrf.aux.eng.ufl.edunrf.aux.eng.ufl.edu