Veeco

4-point

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The Veeco 4-point probe is a metrology tool for measuring sheet resistance and resistivity of semiconductor wafers and thin films. The Veeco 4-point probe can accept wafers up to 6 inches in diameter.^[1]^[2]

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What is it?

The source identifies Veeco 4-point probe as part of the ASU NanoFab metrology suite equipment list. No further specifications, lifecycle information, or variant details are stated in the provided source.

What do the numbers mean?

Wafer handling2

Maximum substrate size: 6 inch^[1]
Probe mechanism: Wafer is moved into the probe head, not vice versa^[2]

Configuration & options2

Listed in metrology suite: Veeco 4-point probe^[3]
Measurement capabilities: Sheet resistance, slice resistivity, V/I, metallization thickness, P‑N type testing^[2]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What parameters can the VEECO FPP-5000 measure?

The VEECO FPP-5000 can measure V/I, sheet or slice resistivity, and metallization thickness, and perform P-N type testing.^[2]

What is the maximum substrate size for the Veeco 4-point probe at ASU NanoFab?

The maximum substrate size is 6 inches.^[1]

What is the design difference of the FPP-5000 compared to other four-point probes?

Unlike most four-point probes that move the probe head into the wafer, the FPP-5000 moves the wafer into the probe head, ensuring constant probe force independent of operator force and wafer thickness.^[2]

Not publicly documented

The following facts about the 4-point are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4-point are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4-point are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4-point are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4-point are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4-point is not on record.
Answerable by: an OEM datasheet or a fab qualification report