Comparison ledger
Applied Materials 0010 47763, Lam Research 9600 Metal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | 9600 MetalLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | Wafer chambers |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research TCP 9600 |
| Specifications | ||
| Configuration | 2nd Source New[1] | Etch strip[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | 9600 Metal[4] |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Wafer size | — | Wafer chambers[4] |
| Chemistry | — | BCL3, C2, SF6, HE, AR[4] |
| Operating System | — | Lam Special[4] |
| Make | — | Lam[4] |
| Category | — | Etch[5] |
| Wafer handling | — | Wafer chambers[5] |
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