Comparison ledger
Applied Materials 0010 47763, Lam Research Concept Two Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | Concept Two SpeedLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Lam Research Concept Two |
| Cited variants | — |
|
| Specifications | ||
| Configuration | 2nd Source New[2] | 1 Shrink chamber[8] |
| Type | Monopolar Dual Heated[3] | Chamber Only[1] |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Model | 0010-47763[2] | Concept Two Speed[8] |
| OEM | Applied Materials[2] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[3] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[3] | — |
| Quantity available (source) | 1[3] | — |
| Part number | 0010-47763[3] | — |
| Component type | Electrostatic chuck (ESC) assembly[5] | — |
| Designation | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[4] | — |
| Wafer size reference | 300 mm[6] | — |
| Associated part number | 0041-39086[7] | — |
| Manufacturer | — | Lam Research[9] |
| Configuration option | — | Shrink chamber[9] |
| Asset # | — | 68566[8] |
| Make | — | Lam / Novellus[8] |
| Process type | — | Etch chamber[1] |
| Platform | — | Novellus Concept Two platform[1] |
| Voltage | — | 208 VAC[1] |
| Phase | — | 3 phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Full load current | — | 21 A[1] |
| Main breaker rating | — | 25 A[1] |
| Largest load | — | 8 A[1] |
| Intended wafer size | — | 8 inch[10] |
| Wafer shape | — | Notch[10] |
| SMIF interface | — | Yes[10] |
| Chamber configuration | — | 1 shrink chamber; 1 standard chamber[8] |
| Largest load current | — | 8 A[1] |
| Interrupt current | — | 10 KA[1] |
| Vintage | — | 2010[1] |
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