Comparison ledger
Applied Materials 0015 20064 Part, Brooks ATM 305 307 Atmospheric Wafer Handling Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0015 20064 PartApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Brooks |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0015 20064 Part | Brooks ATM |
| Specifications | ||
| Configuration | Mod.. Rose Enclosures 33121206 Water Lea[1] | Single Arm[3] |
| Manufacturer | Applied Materials[2] | Brooks / PRI[4] |
| Part Number | 0015-20064[2] | — |
| Description | MOD.. ROSE ENCLOSURES 33121206 WATER LEA[2] | single arm atmospheric wafer handling robot[4] |
| OEM | Applied Materials[1] | — |
| Model | 0015 20064[1] | ATM 305/307[4] |
| Wafer sizes (primary) | — | 200/300 mm[4] |
| Wafer sizes (alternative) | — | 6 and 12 inch[3] |
| Version | — | 200/300 mm[4] |
| Arm configuration | — | single arm[4] |
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