Comparison ledger
Applied Materials 0020 17484 Part, Applied Materials Producer GT DARC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 17484 PartApplied Materials | Producer GT DARCApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 17484 Part | Applied Materials Producer |
| Specifications | ||
| Configuration | Bar, Cap Bank, Hdpcvd 300mm Ultima X[1] | 3 Channels[2] |
| Gas | — | SiH4, N2O, NH3[2] |
| FOUP Ports | — | 4[2] |
| Number of channels | — | 3[2] |
| Process gases | — | SiH4, N2O, NH3[2] |
| Number of FOUP ports | — | 4[2] |
| Chiller model | — | SMC HRW008-H1S-DY-X007[2] |
| Power supply type 1 | — | Advanced Energy Apex 3013 (x6)[3] |
| Power supply type 2 | — | Advanced Energy /PDX 900 (x6)[3] |
| Power supply type 3 | — | MKS Astron 2L (x6)[3] |
| Vintage | — | 2016[2] |
| Type | — | PECVD (Plasma-Enhanced Chemical Vapor Deposition) system[2] |
| Category | — | Deposition[3] |
| Channels | — | 3[2] |
| Chiller | — | SMC HRW008-H1S-DY-X007[2] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →