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0020 17484 PartversusSyrus Pro 710 Vacuum

Applied Materials 0020 17484 Part, Leybold Syrus Pro 710 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
OEMApplied MaterialsLeybold
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartLeybold Syrus
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]Stainless steel chamber with flat door of aluminum[2]
Chamber inner diameter—700 mm[2]
Pirani transmitter range—1000 mbar to 10E-3 mbar[2]
Bayard Alpert transmitter range—10E-3 mbar - 10E-9 mbar[2]
Line voltage—3AC400V/230V/+/-10%[2]
Line frequency—50 Hz (60 Hz optional)[2]
OEM—Leybold[2]
Model—Syrus Pro 710 Vacuum[2]
Category—Deposition[3]
Type—vacuum coater[2]
Chamber—stainless steel chamber with flat aluminum door[2]
Viewing port—1 viewing port with polarization filter[2]
Vacuum chamber—water-cooled[2]
Water distribution system—for warm and cold water[2]
Compressed air distribution system—present[2]
Control system—SYRUSpro control system[2]
Main electrical cabinet location—assembled on right hand side of vacuum chamber[2]
Vacuum measurement equipment—2 Pirani transmitters, 1 Ionivac transmitter, 1 Penningvac transmitter[2]
Electrical connection point—3-phases, full loaded Neutral, PE[2]
Vintage—2008[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com