Leybold
Syrus Pro 710 Vacuum
The Leybold Syrus Pro 710 Vacuum is a vacuum coater. The Leybold Syrus Pro 710 Vacuum has a stainless steel chamber with a flat aluminum door. The Leybold Syrus Pro 710 Vacuum has a chamber inner diameter of 700 mm.[1][2]
What it is
How it works
The Leybold Syrus Pro 710 Vacuum uses a water-cooled vacuum chamber and includes a water distribution system for warm and cold water and a compressed air distribution system. The Leybold Syrus Pro 710 Vacuum includes a main electrical cabinet with the SYRUSpro control system and a main switch, and the main electrical cabinet is assembled on the right-hand side of the vacuum chamber.[1][2]
Where it fits in the process flow
The Leybold Syrus Pro 710 Vacuum is categorized as deposition equipment. The Leybold Syrus Pro 710 Vacuum specifies an electrical connection at the main electrical cabinet as three-phase with full loaded neutral and PE, with line voltage of 3AC400V/230V plus or minus 10 percent and line frequency of 50 Hz, with 60 Hz optional.[1][2][3]
Applications
General reference — not yet source-verifiedVacuum coaters are used for thin-film formation in semiconductor, microsystem, and optics-related process work. Vacuum coaters can support applications where a controlled deposited layer is needed for device structures, interconnect-related stacks, surface modification, or optical film formation.
What do the numbers mean?
Power & electrical8
Vacuum & pumping9
Control & software1
Configuration & options17
- Stainless steel chamber with flat door of aluminum[1]
- 1 viewing port with polarization filter[1]
- Water distribution system for warm & cold water[1]
- Compressed air distribution system[1]
- separate[1]
- description) and main switch.[1]
- 2 Pirani transmitter[1]
- 1 Ionivac transmitter[1]
- 1 Penningvac transmitter[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationVacuum chamber water-cooled[1]
- ConfigurationMain electrical cabinet +K1 including SYRUSpro control system (according to[1]
- ConfigurationMain electrical cabinet assembled on right hand side of vacuum chamber.[1]
- ConfigurationVacuum measurement equipment consisting of:[1]
- Pirani transmitter range1000 mbar to 10E-3 mbar[1]
- Bayard Alpert transmitter range10E-3 mbar - 10E-9 mbar[1]
- ConfigurationElectrical connection point at main electrical cabinet +K1:[1]
- Configuration3-phases, full loaded Neutral, PE[1]
- Line voltage3AC400V/230V/+/-10%[1]
- Line frequency50 Hz (60 Hz optional)[1]
- ModelSyrus Pro 710 Vacuum[1]
- Typevacuum coater[1]
- Vacuum chamberwater-cooled[1]
- Main electrical cabinet locationassembled on right hand side of vacuum chamber[1]
- Vacuum measurement equipment2 Pirani transmitters, 1 Ionivac transmitter, 1 Penningvac transmitter[1]
- Bayard Alpert transmitter range10E-3 mbar to 10E-9 mbar[1]
- Electrical connection point3-phases, full loaded Neutral, PE[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Leybold Syrus Pro 710 Vacuum?
Not publicly documented
The following facts about the Syrus Pro 710 Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Syrus Pro 710 Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Syrus Pro 710 Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Syrus Pro 710 Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Syrus Pro 710 Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Syrus Pro 710 Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]CEE 100 CB Spin vs Leybold Syrus Pro 710 Vacuum comparison | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 19, 2026.
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