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Comparison ledger

0020 17484 PartversusPVD1000

Applied Materials 0020 17484 Part, Tystar PVD1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 17484 PartApplied Materials
PVD1000Tystar
OEMApplied MaterialsTystar
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17484 PartTystar PVD1000
Specifications
ConfigurationBar, Cap Bank, Hdpcvd 300mm Ultima X[1]—
Model—PVD1000[2]
Energy source—Ultraviolet light[2]
Operating temperature—Below 150°C[2]
Deposited films—Silicon dioxide (SiO2), silicon nitride (Si3N4), silicon oxynitride (SiON), and other films[2]
Configuration options—Single-chamber and dual-chamber structures[2]
Applicability—Suitable for thin-film deposition on III-V substrates such as gallium arsenide and indium antimonide[2]
Tool type—Photo-enhanced chemical vapor deposition reactor[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]waferpedia.comwaferpedia.com