Waferpedia

Comparison ledger

0020 18455 PartversusMark 40 C

Applied Materials 0020 18455 Part, CHA Mark 40 C, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartCHA Mark 40
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]CHA SR-10 E-Beam Power Supply (10kW)[2]
Process Chamber Dimensions—26” x 26”[2]
Crucible—4 pockets, 15cc each[2]
Power—10kW Heater Power Supply (CHA HPS-671-10)[2]
Ion Gauge Tube—IG-100N[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing