CHA
Mark 40 C
Power
CHA SR-10 E-Beam Power Supply (10kW)[1]
Vacuum
CHA Auto Tech-2 Pump Cycle Controller[1]
Optics
CHA T271-4-1 Electron Beam Source[1]
What is it?
What do the numbers mean?
Power & electrical2
- CHA SR-10 E-Beam Power Supply (10kW)[1]
Vacuum & pumping5
Wafer handling1
- Substrate Heat[1]
Optics & imaging1
- CHA T271-4-1 Electron Beam Source[1]
Performance1
- Sycon STC-200/SQ Deposition Rate Controller[1]
Control & software6
Dimensions & facilities1
Configuration & options3
- Neslab CFT-150 Chillers, Qty 2[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCHA SR-10 E-Beam Power Supply (10kW)[1]
- ConfigurationCHA Auto Tech-2 Pump Cycle Controller[1]
- Power10kW Heater Power Supply (CHA HPS-671-10)[1]
- ConfigurationGranville Philips 307 Vacuum Gauge Control[1]
- ConfigurationMKS Type 250 Pressure/Flow Controller[1]
- ConfigurationCTI-Cryogenics 8500 Compressor[1]
- ConfigurationEdwards E2M40 2-Stage Vacuum Pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Mark 40 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 40 C are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Mark 40 C are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Mark 40 C are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark 40 C are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark 40 C is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Jul 29, 2026.
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