Waferpedia

Comparison ledger

0020 18455 PartversusPVD1000

Applied Materials 0020 18455 Part, Tystar PVD1000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
PVD1000Tystar
OEMApplied MaterialsTystar
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartTystar PVD1000
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Model—PVD1000[2]
Energy source—Ultraviolet light[2]
Operating temperature—Below 150°C[2]
Deposited films—Silicon dioxide (SiO2), silicon nitride (Si3N4), silicon oxynitride (SiON), and other films[2]
Configuration options—Single-chamber and dual-chamber structures[2]
Applicability—Suitable for thin-film deposition on III-V substrates such as gallium arsenide and indium antimonide[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org