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0020 19652 PartversusIH 600 Vacuum

Applied Materials 0020 19652 Part, Edwards IH 600 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0020 19652 PartApplied Materials
OEMApplied MaterialsEdwards
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 19652 PartEdwards IH 600 Vacuum
Cited variants—
Specifications
ConfigurationRetainer Bracket, Top Match, 200mm Ultim[2]—
Type—Vacuum pump[3]
System family—iH dry pumping systems[1]
Pump configuration—HCDP80 dry pump with HCMB600 mechanical booster pump[1]
Peak speed—600 cfm[4]
Ultimate vacuum—3.2 x 10^-4 mbar; 2 x 10^-4 torr; 1.5 x 10^5 Pa; 5.3 x 10^4 Pa[4]
Inlet connection—ISO100[4]
Outlet connection—NW40[4]
Typical shaft seal nitrogen flow—4 slm[4]
Weight—415 kg / 913 lb[4]
Power input—3.1 kW at 50 Hz; 3.4 kW at 60 Hz[4]
Rated motor power—5.1 kW at 50 Hz; 6.1 kW at 60 Hz[4]
Oil capacity—1.65 liter[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]docs.chemtechsci.comdocs.chemtechsci.com